Sputtering is a well-known technology in the field of mechanics, optics and electrical engineering, especially in the semiconductor industry. The Hochschule Niederrhein uses this technology for filament and tape coatings with silver. The use of a hollow cylinder as magnetron and cathode configuration enables the coating of three-dimensional substrates, since the sputtered particles come from all sides.
Compared to other thin film processes, sputter deposition has several advantages, for example, dry sputtering is more environmentally friendly compared to typical chemical processes because no solvents are used and no wastewater is generated. In addition, almost any material can be sputtered, whether conductive or non-conductive (using an RF diode).
At The Hochschule Niederrhein, this machine is used to apply thin for the development of electronic components, e.g. transistors, on filaments.